vibration isolation system providing control by means of
electro-pneumatic in either 3 or 6 Degrees Of Freedom.
active vibration isolation performance without any
amplification at resonance.
level accuracy (+ 10 microns) in both the vertical
and horizontal plane.
deflection and settling time after an acceleration
or deceleration of a moving mass within the machine,
shorter settling times equals greater machine
efficient real time control.
CAN-Bus, one Controller and one High Speed
electro-pneumatic servo valve for each degree of
Controller consists of a microprocessor &
integrated, high resolution sensors for position,
air pressure & acceleration.
Easy-to-use, intelligent WinSNI-Software for setting
up & optimizing the Active vibration isolation
system AIS™ and for providing system diagnostics.
different modes of operation can be selected by
simply using a digital I/O. Scanning mode (during
sensitive machine operations) and loading mode
(during moving mass within the machine).
Feed forward signal is not required from the machine
controller simplifying setup.
disturbing heat generation, magnetic variations or
high electrical power consumption as by
electromagnetic actuators and linear motors.
Optimal active vibration isolation performance for
machines with high dynamic forces that are performing
sensitive measurements and inspections, lithography
equipment, laser machines, high resolution electron
microscopes, interferometer,& machinery for the
The Active vibration isolation system AIS™ is utilized
when the efficiency of isolation and the settling time
of conventional air spring with electro-pneumatic
leveling systems is insufficient.
Active Vibration Isolation System AIS™ has two
primary functions :
One function is to protect the precision machine from
floor vibration. The other primary function is to
improve the performance of the machine by minimizing
structure borne vibration created by the high dynamic
forces produced during an acceleration or deceleration
of a moving mass within the machine. In addition,
settling time is reduced which minimizes the delay time
before the machine can start performing its sensitive
Lab Table with
Active Isolation System
Bilz Test Stand